Abstract: The effect approximate relationship formulas of the phase measurement error on height measurement by InSAR and deformation measurement by two-pass, three-pass and four-pass differential InSAR and the effect formulas of atmospheric delay error on the interferometric phase are put forward respectively, taking simultaneously into account the basic principles of the repeat track InSAR measurements. Then, the effect approximate relationship formulas of the atmospheric delay error on height measurement by InSAR and deformation measurement by two-pass differential InSAR, three-pass differential InSAR, four-pass differential InSAR are deduced respectively based on the above formulas. In the last place, the useful conclusions of the effect of atmospheric delay error on InSAR data processing are drawn by taking ERS-1 satellite system simulation experiments as an example and by talking over and analyzing the effect of atmospheric delay error on height measurement by InSAR and deformation measurement by two-pass differential InSAR, three-pass differential InSAR and four-pass differential InSAR etc.