面向冷气推力器的高分辨率低噪声微流量传感器设计与标定
doi: 10.11728/cjss2025.02.2024-0147 cstr: 32142.14.cjss.2024-0147
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孙博奥 男, 2001年6月出生于陕西省渭南市, 现为中国科学院国家空间科学中心电子信息硕士研究生, 主要研究方向为高精度空间时频分布. E-mail: sunboao23@mails.ucas.ac.cn -
郑福 男, 1989年出生于河北省张家口市, 中国科学院国家空间科学中心博士, 现为中国科学院国家空间科学中心副研究员, 主要研究方向为弱信号检测与数字处理和智能信息处理. E-mail: fzheng@nssc.ac.cn
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Design and Calibration of High-resolution Low-noise Micro Flow Sensors for Cold Gas Thrusters
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摘要: 微流量传感器用于精确测量和控制流经推力器的气体流量, 其性能直接影响冷气推力器系统的整体表现. 针对当前微流量传感器分辨率低、噪声大和响应时间慢的问题, 研制了一种基于恒温差原理的MEMS微流量传感器系统. 该传感器采用了4个MEMS铂电阻构成恒温差架构, 通过高精度恒温差驱动电路实现温差恒定, 经过测温电桥将温度变化信号经过高精度程控放大器输入到24位高精度模数转换器(ADC)进行采样, 实现了低噪声和高精度的微流量信号采集. 测试结果显示, 该微流量传感器在0.05～1 Hz等效输出噪声小于 0.126 μL·s–1·Hz–1/2, 分辨率达到0.06 μL·s–1, 量程为0～1000 μL·s–1, 响应时间为1.2 ms. 其测量分辨率高、噪声低、响应速度快, 为空间引力波探测中的冷气推力器系统提供了关键的技术支持.Abstract: Micro flow sensors are critical for the precise measurement and control of gas flow in cold gas thruster systems, directly influencing the overall performance of these systems in space applications. However, conventional micro flow sensors suffer from limitations such as low resolution, high noise, and slow response time, which restrict their effectiveness in high-precision scenarios like drag-free control for space-based gravitational wave detection. To address these challenges, this paper presents the development of a MEMS-based micro flow sensor system utilizing the constant temperature difference principle. The sensor incorporates four MEMS platinum resistors arranged in a constant temperature difference configuration. A high-precision constant temperature difference driving circuit maintains a stable temperature gradient at the sensor's detection site, ensuring enhanced measurement consistency. The sensor system employs a temperature measurement bridge, which converts minute temperature variations into electrical signals. These signals are subsequently amplified by a high-precision programmable amplifier and digitized using a 24-bit high-resolution ADC. This approach significantly reduces noise while improving measurement precision, overcoming the limitations of traditional micro flow sensors. Experimental results demonstrate that the developed micro flow sensor achieves an equivalent output noise of less than 0.126 μL·s–1·Hz–1/2 in the frequency range of 0.05 Hz to 1 Hz. Additionally, it offers an ultra-high resolution of better than 0.06 μL·s–1, a measurement range of 0 to 1000 μL·s–1, and a rapid response time of 1.2 ms. These improvements in measurement resolution, noise suppression, and response speed significantly enhance the sensor’s performance, making it well-suited for demanding aerospace applications. The advancements in this micro flow sensor system provide crucial technical support for cold gas thruster systems in space gravitational wave detection missions. By improving flow measurement accuracy and stability, this sensor contributes to the enhanced performance of drag-free control systems, ensuring the precise and stable operation of spacecraft during gravitational wave observations.
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Key words:
- Micro flow /
- Constant temperature difference /
- Low noise /
- High resolution /
- Cold gas thruster
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图 7 AD采集的原始数据. (a) CHOP=0时的原始数据, (b) CHOP=1时的原始数据
Figure 7. Raw data collected by AD. (a) Raw data at CHOP = 0, (b) raw data at CHOP = 1
图 11 微流量0 μL·s–1时的噪声功率谱密度
Figure 11. Noise Power Spectral Density (PSD) at microflow of 0 μL·s–1
图 13 微流量10 μL·s–1时的噪声功率谱密度
Figure 13. Noise Power Spectral Density (PSD) at microflow of 10 μL·s–1
表 1 电压与流量拟合
Table 1. Voltage and flow fitting
电压/mV 微流量/ (μL·s–1) 电压/mV 微流量/(μL·s–1) 0.31 0 3.9 228.84 0.26 0 4.46 263.34 1 8.83 5.53 365.17 1.01 11.67 5.72 371.51 1.06 21.83 6.82 516.34 1.11 39.00 7 543.68 1.12 48.50 7.29 587.18 1.15 56.67 8.1 746.68 1.87 116.67 8.44 811.85 2.51 162.84 9.5 1079.19 
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